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Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal
Energy leakage via anchors in substrate plates impairs the quality factor (Q) in microelectromechanical system (MEMS) resonators. Most phononic crystals (PnCs) require complicated fabrication conditions and have difficulty generating a narrow bandgap at high frequency. This paper demonstrates a pill...
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| Veröffentlicht in: | Micromachines (Basel) |
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| Hauptverfasser: | , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI
2021
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7825680/ https://ncbi.nlm.nih.gov/pubmed/33430263 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12010062 |
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