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Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal

Energy leakage via anchors in substrate plates impairs the quality factor (Q) in microelectromechanical system (MEMS) resonators. Most phononic crystals (PnCs) require complicated fabrication conditions and have difficulty generating a narrow bandgap at high frequency. This paper demonstrates a pill...

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Bibliografiske detaljer
Udgivet i:Micromachines (Basel)
Main Authors: Tong, Yinjie, Han, Tao
Format: Artigo
Sprog:Inglês
Udgivet: MDPI 2021
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC7825680/
https://ncbi.nlm.nih.gov/pubmed/33430263
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12010062
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