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Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal
Energy leakage via anchors in substrate plates impairs the quality factor (Q) in microelectromechanical system (MEMS) resonators. Most phononic crystals (PnCs) require complicated fabrication conditions and have difficulty generating a narrow bandgap at high frequency. This paper demonstrates a pill...
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| Publicado no: | Micromachines (Basel) |
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| Main Authors: | , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2021
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7825680/ https://ncbi.nlm.nih.gov/pubmed/33430263 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12010062 |
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