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Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal
Energy leakage via anchors in substrate plates impairs the quality factor (Q) in microelectromechanical system (MEMS) resonators. Most phononic crystals (PnCs) require complicated fabrication conditions and have difficulty generating a narrow bandgap at high frequency. This paper demonstrates a pill...
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| Опубликовано в: : | Micromachines (Basel) |
|---|---|
| Главные авторы: | , |
| Формат: | Artigo |
| Язык: | Inglês |
| Опубликовано: |
MDPI
2021
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| Предметы: | |
| Online-ссылка: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7825680/ https://ncbi.nlm.nih.gov/pubmed/33430263 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12010062 |
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