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Nonlinear Vibration Study Based on Uncertainty Analysis in MEMS Resonant Accelerometer

This paper aims to develop a resonant accelerometer for high-sensitivity detection and to investigate the nonlinear vibration of the MEMS resonant accelerometer driven by electrostatic comb fingers. First, a nonlinear vibration model of the resonator with comb fingers in a MEMS resonant acceleromete...

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Bibliografische gegevens
Gepubliceerd in:Sensors (Basel)
Hoofdauteurs: Li, Yan, Song, Linke, Liang, Shuai, Xiao, Yifeng, Yang, Fuling
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: MDPI 2020
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Online toegang:https://ncbi.nlm.nih.gov/pmc/articles/PMC7766775/
https://ncbi.nlm.nih.gov/pubmed/33339268
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20247207
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