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A Compensation Method for Nonlinear Vibration of Silicon-Micro Resonant Sensor

A compensation method for nonlinear vibration of a silicon micro resonant sensor is proposed and evaluated to be effective through simulation and experimental analysis. Firstly, the parameter characterization model of the silicon micro resonant sensor is established, which presents significant nonli...

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Détails bibliographiques
Publié dans:Sensors (Basel)
Auteurs principaux: Li, Yan, Li, Hao, Xiao, Yifeng, Cao, Le, Guo, Zhan-She
Format: Artigo
Langue:Inglês
Publié: MDPI 2021
Sujets:
Accès en ligne:https://ncbi.nlm.nih.gov/pmc/articles/PMC8038624/
https://ncbi.nlm.nih.gov/pubmed/33916484
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s21072545
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