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A Compensation Method for Nonlinear Vibration of Silicon-Micro Resonant Sensor

A compensation method for nonlinear vibration of a silicon micro resonant sensor is proposed and evaluated to be effective through simulation and experimental analysis. Firstly, the parameter characterization model of the silicon micro resonant sensor is established, which presents significant nonli...

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Bibliographic Details
Published in:Sensors (Basel)
Main Authors: Li, Yan, Li, Hao, Xiao, Yifeng, Cao, Le, Guo, Zhan-She
Format: Artigo
Language:Inglês
Published: MDPI 2021
Subjects:
Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC8038624/
https://ncbi.nlm.nih.gov/pubmed/33916484
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s21072545
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