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A Compensation Method for Nonlinear Vibration of Silicon-Micro Resonant Sensor
A compensation method for nonlinear vibration of a silicon micro resonant sensor is proposed and evaluated to be effective through simulation and experimental analysis. Firstly, the parameter characterization model of the silicon micro resonant sensor is established, which presents significant nonli...
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| Publié dans: | Sensors (Basel) |
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| Auteurs principaux: | , , , , |
| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
MDPI
2021
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| Sujets: | |
| Accès en ligne: | https://ncbi.nlm.nih.gov/pmc/articles/PMC8038624/ https://ncbi.nlm.nih.gov/pubmed/33916484 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s21072545 |
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