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A Resonant Pressure Microsensor with Temperature Compensation Method Based on Differential Outputs and a Temperature Sensor

This paper presents the analysis and characterization of a resonant pressure microsensor, which employs a temperature compensation method based on differential outputs and a temperature sensor. Leveraging a silicon-on-insulator (SOI) wafer, this microsensor mainly consists of a pressure-sensitive di...

Deskribapen osoa

Gorde:
Xehetasun bibliografikoak
Argitaratua izan da:Micromachines (Basel)
Egile Nagusiak: Xiang, Chao, Lu, Yulan, Yan, Pengcheng, Chen, Jian, Wang, Junbo, Chen, Deyong
Formatua: Artigo
Hizkuntza:Inglês
Argitaratua: MDPI 2020
Gaiak:
Sarrera elektronikoa:https://ncbi.nlm.nih.gov/pmc/articles/PMC7700299/
https://ncbi.nlm.nih.gov/pubmed/33233469
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11111022
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