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A Resonant Pressure Microsensor with a Wide Pressure Measurement Range

This paper presents a resonant pressure microsensor with a wide range of pressure measurements. The developed microsensor is mainly composed of a silicon-on-insulator (SOI) wafer to form pressure-sensing elements, and a silicon-on-glass (SOG) cap to form vacuum encapsulation. To realize a wide range...

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Publicat a:Micromachines (Basel)
Autors principals: Xiang, Chao, Lu, Yulan, Cheng, Chao, Wang, Junbo, Chen, Deyong, Chen, Jian
Format: Artigo
Idioma:Inglês
Publicat: MDPI 2021
Matèries:
Accés en línia:https://ncbi.nlm.nih.gov/pmc/articles/PMC8066463/
https://ncbi.nlm.nih.gov/pubmed/33916030
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12040382
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