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A Resonant Pressure Microsensor with Temperature Compensation Method Based on Differential Outputs and a Temperature Sensor

This paper presents the analysis and characterization of a resonant pressure microsensor, which employs a temperature compensation method based on differential outputs and a temperature sensor. Leveraging a silicon-on-insulator (SOI) wafer, this microsensor mainly consists of a pressure-sensitive di...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Xiang, Chao, Lu, Yulan, Yan, Pengcheng, Chen, Jian, Wang, Junbo, Chen, Deyong
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2020
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7700299/
https://ncbi.nlm.nih.gov/pubmed/33233469
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11111022
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