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The impact of dislocations on AlGaN/GaN Schottky diodes and on gate failure of high electron mobility transistors

GaN epitaxially grown on Si is a material for power electronics that intrinsically shows a high density of dislocations. We show by Conductive Atomic Force Microscopy (C-AFM) and Defect Selective Etching that even for materials with similar total dislocation densities substantially different subsets...

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Podrobná bibliografie
Vydáno v:Sci Rep
Hlavní autoři: Besendörfer, Sven, Meissner, Elke, Medjdoub, Farid, Derluyn, Joff, Friedrich, Jochen, Erlbacher, Tobias
Médium: Artigo
Jazyk:Inglês
Vydáno: Nature Publishing Group UK 2020
Témata:
On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC7560755/
https://ncbi.nlm.nih.gov/pubmed/33057086
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-020-73977-2
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