Chargement en cours...
Optical fiber Fabry-Pérot micro-displacement sensor for MEMS in-plane motion stage
Fabry-Pérot interferometer sensors have been widely used in Micro-Electro-Mechanical-Systems (MEMS) due to high displacement accuracy and immunity to electromagnetic noises, but they are still limited by micro scale measurement range. In this paper, a Fabry-Pérot interferometer in-plane displacement...
Enregistré dans:
| Publié dans: | Microelectron Eng |
|---|---|
| Auteurs principaux: | , , |
| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
2018
|
| Sujets: | |
| Accès en ligne: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7552813/ https://ncbi.nlm.nih.gov/pubmed/33060873 |
| Tags: |
Ajouter un tag
Pas de tags, Soyez le premier à ajouter un tag!
|