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High-Consistency Optical Fiber Fabry–Perot Pressure Sensor Based on Silicon MEMS Technology for High Temperature Environment
This paper proposes a high-temperature optical fiber Fabry–Perot pressure sensor based on the micro-electro-mechanical system (MEMS). The sensing structure of the sensor is composed of Pyrex glass wafer and silicon wafer manufactured by mass micromachining through anodic bonding process. The separat...
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| Udgivet i: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , , , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
MDPI
2021
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC8228703/ https://ncbi.nlm.nih.gov/pubmed/34071225 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12060623 |
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