ロード中...
High-Consistency Optical Fiber Fabry–Perot Pressure Sensor Based on Silicon MEMS Technology for High Temperature Environment
This paper proposes a high-temperature optical fiber Fabry–Perot pressure sensor based on the micro-electro-mechanical system (MEMS). The sensing structure of the sensor is composed of Pyrex glass wafer and silicon wafer manufactured by mass micromachining through anodic bonding process. The separat...
保存先:
| 出版年: | Micromachines (Basel) |
|---|---|
| 主要な著者: | , , , , , |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
MDPI
2021
|
| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC8228703/ https://ncbi.nlm.nih.gov/pubmed/34071225 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12060623 |
| タグ: |
タグ追加
タグなし, このレコードへの初めてのタグを付けませんか!
|