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Optical fiber Fabry-Pérot micro-displacement sensor for MEMS in-plane motion stage
Fabry-Pérot interferometer sensors have been widely used in Micro-Electro-Mechanical-Systems (MEMS) due to high displacement accuracy and immunity to electromagnetic noises, but they are still limited by micro scale measurement range. In this paper, a Fabry-Pérot interferometer in-plane displacement...
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| Publicado no: | Microelectron Eng |
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| Main Authors: | , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2018
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7552813/ https://ncbi.nlm.nih.gov/pubmed/33060873 |
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