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Bottom-up Filling of Damascene Trenches with Gold in a Sulfite Electrolyte
Superconformal Au deposition is demonstrated in a Na(3)Au(SO(3))(2 +) Na(2)SO(3) electrolyte using Bi species to catalyze the reduction of Au(SO(3))(2)(3−). Micromolar additions of Bi(3+) to the sulfite-based electrolyte accelerate the reduction of Au(SO(3))(2)(3−) as shown by hysteretic voltammetry...
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| Publié dans: | J Electrochem Soc |
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| Auteurs principaux: | , |
| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
2019
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| Sujets: | |
| Accès en ligne: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7542677/ https://ncbi.nlm.nih.gov/pubmed/33041353 |
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