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Accelerated Bottom-Up Gold Filling of Metallized Trenches
This work extends previously detailed void-free, bottom-up feature filling in a near-neutral Na(3)Au(SO(3))(2) + Na(2)SO(3) electrolyte containing micromolar concentrations of Bi(3+). Bottom-up electrodeposition in 17 μm and 45 μm tall trenches with an aspect ratio greater than 10 is demonstrated us...
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| Pubblicato in: | J Electrochem Soc |
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| Autori principali: | , , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
2019
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7543056/ https://ncbi.nlm.nih.gov/pubmed/33041356 |
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