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Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing
Based on experimental data, this paper thoroughly investigates the impact of a gas fluid flow on the behavior of a MEMS resonator specifically oriented to gas sensing. It is demonstrated that the gas stream action itself modifies the device resonance frequency in a way that depends on the resonator...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7506693/ https://ncbi.nlm.nih.gov/pubmed/32824963 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20174663 |
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