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A Tunable-Gain Transimpedance Amplifier for CMOS-MEMS Resonators Characterization
CMOS-MEMS resonators have become a promising solution thanks to their miniaturization and on-chip integration capabilities. However, using a CMOS technology to fabricate microelectromechanical system (MEMS) devices limits the electromechanical performance otherwise achieved by specific technologies,...
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| Publicado en: | Micromachines (Basel) |
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| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI
2021
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7830080/ https://ncbi.nlm.nih.gov/pubmed/33467477 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12010082 |
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