Načítá se...
Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing
Based on experimental data, this paper thoroughly investigates the impact of a gas fluid flow on the behavior of a MEMS resonator specifically oriented to gas sensing. It is demonstrated that the gas stream action itself modifies the device resonance frequency in a way that depends on the resonator...
Uloženo v:
| Vydáno v: | Sensors (Basel) |
|---|---|
| Hlavní autoři: | , , , |
| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
MDPI
2020
|
| Témata: | |
| On-line přístup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7506693/ https://ncbi.nlm.nih.gov/pubmed/32824963 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20174663 |
| Tagy: |
Přidat tag
Žádné tagy, Buďte první, kdo otaguje tento záznam!
|