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An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization
In this work, we report on the integration of an atomic force microscope (AFM) into a helium ion microscope (HIM). The HIM is a powerful instrument, capable of imaging and machining of nanoscale structures with sub-nanometer resolution, while the AFM is a well-established versatile tool for multipar...
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| Publicado no: | Beilstein J Nanotechnol |
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| Main Authors: | , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Beilstein-Institut
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7476598/ https://ncbi.nlm.nih.gov/pubmed/32953371 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.11.111 |
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