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Channeling in helium ion microscopy: Mapping of crystal orientation
Background: The unique surface sensitivity and the high resolution that can be achieved with helium ion microscopy make it a competitive technique for modern materials characterization. As in other techniques that make use of a charged particle beam, channeling through the crystal structure of the b...
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| Hauptverfasser: | , , , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
Beilstein-Institut
2012
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3458594/ https://ncbi.nlm.nih.gov/pubmed/23019544 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.3.57 |
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