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Effective silicon production from SiCl(4) source using hydrogen radicals generated and transported at atmospheric pressure
In the Siemens method, high-purity Si is produced by reducing SiHCl(3) source gas with H(2) ambient under atmospheric pressure. Since the pyrolysis of SiHCl(3), which produces SiCl(4) as a byproduct, occurs dominantly in the practical Siemens process, the Si yield is low (~30%). In the present study...
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| Publicado no: | Sci Technol Adv Mater |
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| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Taylor & Francis
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7476485/ https://ncbi.nlm.nih.gov/pubmed/32939173 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1080/14686996.2020.1789438 |
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