載入...
Effective silicon production from SiCl(4) source using hydrogen radicals generated and transported at atmospheric pressure
In the Siemens method, high-purity Si is produced by reducing SiHCl(3) source gas with H(2) ambient under atmospheric pressure. Since the pyrolysis of SiHCl(3), which produces SiCl(4) as a byproduct, occurs dominantly in the practical Siemens process, the Si yield is low (~30%). In the present study...
Na minha lista:
| 發表在: | Sci Technol Adv Mater |
|---|---|
| Main Authors: | , , , |
| 格式: | Artigo |
| 語言: | Inglês |
| 出版: |
Taylor & Francis
2020
|
| 主題: | |
| 在線閱讀: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7476485/ https://ncbi.nlm.nih.gov/pubmed/32939173 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1080/14686996.2020.1789438 |
| 標簽: |
添加標簽
沒有標簽, 成為第一個標記此記錄!
|