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Effect of the SiCl(4) Flow Rate on SiBN Deposition Kinetics in SiCl(4)-BCl(3)-NH(3)-H(2)-Ar Environment
To improve the thermal and mechanical stability of SiC(f)/SiC or C/SiC composites with SiBN interphase, SiBN coating was deposited by low pressure chemical vapor deposition (LPCVD) using SiCl(4)-BCl(3)-NH(3)-H(2)-Ar gas system. The effect of the SiCl(4) flow rate on deposition kinetics was investiga...
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| Publicado no: | Materials (Basel) |
|---|---|
| Main Authors: | , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2017
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5553535/ https://ncbi.nlm.nih.gov/pubmed/28772986 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma10060627 |
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