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10 MHz Thin-Film PZT-Based Flexible PMUT Array: Finite Element Design and Characterization
Piezoelectric micromachined ultrasound transducers (PMUT) incorporating lead zirconate titanate PbZr(0.52)Ti(0.48)O(3) (PZT) thin films were investigated for miniaturized high-frequency ultrasound systems. A recently developed process to remove a PMUT from an underlying silicon (Si) substrate has en...
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| Veröffentlicht in: | Sensors (Basel) |
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| Hauptverfasser: | , , , , , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI
2020
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7435793/ https://ncbi.nlm.nih.gov/pubmed/32759665 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20154335 |
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