Heavily-Doped Bulk Silicon Sidewall Electrodes Embedded between Free-Hanging Microfluidic Channels by Modified Surface Channel Technology

Surface Channel Technology is known as the fabrication platform to make free-hanging microchannels for various microfluidic sensors and actuators. In this technology, thin film metal electrodes, such as platinum or gold, are often used for electrical sensing and actuation purposes. As a result that...

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Bibliografiske detaljer
Udgivet i:Micromachines (Basel)
Main Authors: Zhao, Yiyuan, Veltkamp, Henk-Willem, Schut, Thomas V. P., Sanders, Remco G. P., Breazu, Bogdan, Groenesteijn, Jarno, de Boer, Meint J., Wiegerink, Remco J., Lötters, Joost C.
Format: Artigo
Sprog:Inglês
Udgivet: MDPI 2020
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Article
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC7344707/
https://ncbi.nlm.nih.gov/pubmed/32486348
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11060561
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