On Frequency-Based Interface Circuits for Capacitive MEMS Accelerometers

מאת Qiao, Zhiliang, Boom, Boris A., Annema, Anne-Johan, Wiegerink, Remco J., Nauta, Bram
הוצא לאור ב Micromachines (Basel) (2018)

Heavily-Doped Bulk Silicon Sidewall Electrodes Embedded between Free-Hanging Microfluidic Channels by Modified Surface Channel Technology

מאת Zhao, Yiyuan, Veltkamp, Henk-Willem, Schut, Thomas V. P., Sanders, Remco G. P., Breazu, Bogdan, Groenesteijn, Jarno, de Boer, Meint J., Wiegerink, Remco J., Lötters, Joost C.
הוצא לאור ב Micromachines (Basel) (2020)