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On Frequency-Based Interface Circuits for Capacitive MEMS Accelerometers

Interface circuits for capacitive MEMS accelerometers are conventionally based on charge-based approaches. A promising alternative to these is provided by frequency-based readout techniques that have some unique advantages as well as a few challenges associated with them. This paper addresses these...

Täydet tiedot

Tallennettuna:
Bibliografiset tiedot
Julkaisussa:Micromachines (Basel)
Päätekijät: Qiao, Zhiliang, Boom, Boris A., Annema, Anne-Johan, Wiegerink, Remco J., Nauta, Bram
Aineistotyyppi: Artigo
Kieli:Inglês
Julkaistu: MDPI 2018
Aiheet:
Linkit:https://ncbi.nlm.nih.gov/pmc/articles/PMC6215180/
https://ncbi.nlm.nih.gov/pubmed/30424421
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9100488
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