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On Frequency-Based Interface Circuits for Capacitive MEMS Accelerometers
Interface circuits for capacitive MEMS accelerometers are conventionally based on charge-based approaches. A promising alternative to these is provided by frequency-based readout techniques that have some unique advantages as well as a few challenges associated with them. This paper addresses these...
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| Veröffentlicht in: | Micromachines (Basel) |
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| Hauptverfasser: | , , , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI
2018
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6215180/ https://ncbi.nlm.nih.gov/pubmed/30424421 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9100488 |
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