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A Flow-Through Microfluidic Relative Permittivity Sensor
In this paper, we present the design, simulation, fabrication and characterization of a microfluidic relative permittivity sensor in which the fluid flows through an interdigitated electrode structure. Sensor fabrication is based on an silicon on insulator (SOI) wafer where the fluidic inlet and out...
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| Publicado no: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7142741/ https://ncbi.nlm.nih.gov/pubmed/32245134 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11030325 |
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