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A Flow-Through Microfluidic Relative Permittivity Sensor
In this paper, we present the design, simulation, fabrication and characterization of a microfluidic relative permittivity sensor in which the fluid flows through an interdigitated electrode structure. Sensor fabrication is based on an silicon on insulator (SOI) wafer where the fluidic inlet and out...
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| Udgivet i: | Micromachines (Basel) |
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| Main Authors: | , , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
MDPI
2020
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7142741/ https://ncbi.nlm.nih.gov/pubmed/32245134 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11030325 |
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