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μ-Coriolis Mass Flow Sensor with Resistive Readout

This paper presents a [Formula: see text]-Coriolis mass flow sensor with resistive readout. Instead of measuring a net displacement such as in a capacitive readout, a resistive readout detects the deformation of the suspended micro-fluidic channel. It allows for actuation at much higher amplitudes t...

Deskribapen osoa

Gorde:
Xehetasun bibliografikoak
Argitaratua izan da:Micromachines (Basel)
Egile Nagusiak: Schut, Thomas, Wiegerink, Remco, Lötters, Joost
Formatua: Artigo
Hizkuntza:Inglês
Argitaratua: MDPI 2020
Gaiak:
Sarrera elektronikoa:https://ncbi.nlm.nih.gov/pmc/articles/PMC7074603/
https://ncbi.nlm.nih.gov/pubmed/32053956
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11020184
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