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Ultrasmall, Ultracompact and Ultrahigh Efficient InGaN Micro Light Emitting Diodes (μLEDs) with Narrow Spectral Line Width
[Image: see text] Augmented reality and visual reality (AR and VR) microdisplays require micro light emitting diodes (μLEDs) with an ultrasmall dimension (≤5 μm), high external quantum efficiency (EQE), and narrow spectral line width. Unfortunately, dry etching which is the most crucial step for the...
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| Publicado en: | ACS Nano |
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| Main Authors: | , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
American
Chemical Society
2020
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| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7315628/ https://ncbi.nlm.nih.gov/pubmed/32453549 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acsnano.0c01180 |
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