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Dataset for TiN Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition Using Tetrakis(dimethylamino)titanium (TDMAT) and Titanium Tetrachloride (TiCl(4)) Precursor
A dataset in this report is regarding an article “Ultrathin Effective TiN Protective Films Prepared by Plasma-Enhanced Atomic Layer Deposition for High Performance Metallic Bipolar Plates of Polymer Electrolyte Membrane Fuel Cells” [1]. TiN (Titanium Nitride) thin films were deposited by Plasma-Enha...
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| Pubblicato in: | Data Brief |
|---|---|
| Autori principali: | , , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
Elsevier
2020
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7287241/ https://ncbi.nlm.nih.gov/pubmed/32551348 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.dib.2020.105777 |
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