Caricamento...

Dataset for TiN Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition Using Tetrakis(dimethylamino)titanium (TDMAT) and Titanium Tetrachloride (TiCl(4)) Precursor

A dataset in this report is regarding an article “Ultrathin Effective TiN Protective Films Prepared by Plasma-Enhanced Atomic Layer Deposition for High Performance Metallic Bipolar Plates of Polymer Electrolyte Membrane Fuel Cells” [1]. TiN (Titanium Nitride) thin films were deposited by Plasma-Enha...

Descrizione completa

Salvato in:
Dettagli Bibliografici
Pubblicato in:Data Brief
Autori principali: Lee, Woo-Jae, Yun, Eun-Young, Lee, Han-Bo-Ram, Hong, Suck Won, Kwon, Se-Hun
Natura: Artigo
Lingua:Inglês
Pubblicazione: Elsevier 2020
Soggetti:
Accesso online:https://ncbi.nlm.nih.gov/pmc/articles/PMC7287241/
https://ncbi.nlm.nih.gov/pubmed/32551348
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.dib.2020.105777
Tags: Aggiungi Tag
Nessun Tag, puoi essere il primo ad aggiungerne! !