Data set for fabrication of conformal two-dimensional TiO(2) by atomic layer deposition using tetrakis (dimethylamino) titanium (TDMAT) and H(2)O precursors

The data and complementary information presented hare are related to the research article of “http://dx.doi.org/10.1016/j.matdes.2017.02.016; Materials and Design 120 (2017) 99–108” [1]. The article provides data and information on the case of atomic layer deposition (ALD) of ultra-thin two-dimensio...

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Bibliografiske detaljer
Udgivet i:Data Brief
Main Authors: Zhuiykov, Serge, Akbari, Mohammad Karbalaei, Hai, Zhenyin, Xue, Chenyang, Xu, Hongyan, Hyde, Lachlan
Format: Artigo
Sprog:Inglês
Udgivet: Elsevier 2017
Fag:
Data Article
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC5480828/
https://ncbi.nlm.nih.gov/pubmed/28664177
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.dib.2017.06.013
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