Data set for fabrication of conformal two-dimensional TiO(2) by atomic layer deposition using tetrakis (dimethylamino) titanium (TDMAT) and H(2)O precursors

Por Zhuiykov, Serge, Akbari, Mohammad Karbalaei, Hai, Zhenyin, Xue, Chenyang, Xu, Hongyan, Hyde, Lachlan
Publicado no Data Brief (2017)