A carregar...
Dataset for TiN Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition Using Tetrakis(dimethylamino)titanium (TDMAT) and Titanium Tetrachloride (TiCl(4)) Precursor
A dataset in this report is regarding an article “Ultrathin Effective TiN Protective Films Prepared by Plasma-Enhanced Atomic Layer Deposition for High Performance Metallic Bipolar Plates of Polymer Electrolyte Membrane Fuel Cells” [1]. TiN (Titanium Nitride) thin films were deposited by Plasma-Enha...
Na minha lista:
| Publicado no: | Data Brief |
|---|---|
| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Elsevier
2020
|
| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7287241/ https://ncbi.nlm.nih.gov/pubmed/32551348 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.dib.2020.105777 |
| Tags: |
Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!
|