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Formation of Thin NiGe Films by Magnetron Sputtering and Flash Lamp Annealing
The nickel monogermanide (NiGe) phase is known for its electrical properties such as low ohmic and low contact resistance in group-IV-based electronics. In this work, thin films of nickel germanides (Ni–Ge) were formed by magnetron sputtering followed by flash lamp annealing (FLA). The formation of...
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| Yayımlandı: | Nanomaterials (Basel) |
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| Asıl Yazarlar: | , , , , , , , , |
| Materyal Türü: | Artigo |
| Dil: | Inglês |
| Baskı/Yayın Bilgisi: |
MDPI
2020
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| Konular: | |
| Online Erişim: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7221967/ https://ncbi.nlm.nih.gov/pubmed/32244356 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano10040648 |
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