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Effect of Ge Content on the Formation of Ge Nanoclusters in Magnetron-Sputtered GeZrO(x)-Based Structures
Ge-rich ZrO(2) films, fabricated by confocal RF magnetron sputtering of pure Ge and ZrO(2) targets in Ar plasma, were studied by multi-angle laser ellipsometry, Raman scattering, Auger electron spectroscopy, Fourier transform infrared spectroscopy, and X-ray diffraction for varied deposition conditi...
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| Vydáno v: | Nanoscale Res Lett |
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| Hlavní autoři: | , , , , , , , , , |
| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
Springer US
2017
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| Témata: | |
| On-line přístup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5355413/ https://ncbi.nlm.nih.gov/pubmed/28314364 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-017-1960-9 |
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