Wird geladen...
Effect of Ge Content on the Formation of Ge Nanoclusters in Magnetron-Sputtered GeZrO(x)-Based Structures
Ge-rich ZrO(2) films, fabricated by confocal RF magnetron sputtering of pure Ge and ZrO(2) targets in Ar plasma, were studied by multi-angle laser ellipsometry, Raman scattering, Auger electron spectroscopy, Fourier transform infrared spectroscopy, and X-ray diffraction for varied deposition conditi...
Gespeichert in:
| Veröffentlicht in: | Nanoscale Res Lett |
|---|---|
| Hauptverfasser: | , , , , , , , , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
Springer US
2017
|
| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5355413/ https://ncbi.nlm.nih.gov/pubmed/28314364 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-017-1960-9 |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|