Si-rich Al(2)O(3) films grown by RF magnetron sputtering: structural and photoluminescence properties versus annealing treatment

Silicon-rich Al(2)O(3) films (Si(x)(Al(2)O(3))(1−x)) were co-sputtered from two separate silicon and alumina targets onto a long silicon oxide substrate. The effects of different annealing treatments on the structure and light emission of the films versus x were investigated by means of spectroscopi...

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Detalhes bibliográficos
Main Authors: Korsunska, Nadiia, Khomenkova, Larysa, Kolomys, Oleksandr, Strelchuk, Viktor, Kuchuk, Andrian, Kladko, Vasyl, Stara, Tetyana, Oberemok, Oleksandr, Romanyuk, Borys, Marie, Philippe, Jedrzejewski, Jedrzej, Balberg, Isaac
Formato: Artigo
Idioma:Inglês
Publicado em: Springer 2013
Assuntos:
Nano Express
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3680024/
https://ncbi.nlm.nih.gov/pubmed/23758885
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-8-273
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