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Fabrication and Characteristics of a Three-Axis Accelerometer with Double L-Shaped Beams
A three-axis accelerometer with a double L-shaped beams structure was designed and fabricated in this paper, consisting of a supporting body, four double L-shaped beams and intermediate double beams connected to two mass blocks. When applying acceleration to the accelerometer chip, according to the...
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| Publicado no: | Sensors (Basel) |
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| Main Authors: | , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7146347/ https://ncbi.nlm.nih.gov/pubmed/32213816 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20061780 |
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