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Fabrication and Characteristics of a SOI Three-Axis Acceleration Sensor Based on MEMS Technology
A silicon-on-insulator (SOI) piezoresistive three-axis acceleration sensor, consisting of four L-shaped beams, two intermediate double beams, two masses, and twelve piezoresistors, was presented in this work. To detect the acceleration vector (a(x), a(y), and a(z)) along three directions, twelve pie...
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| Publicat a: | Micromachines (Basel) |
|---|---|
| Autors principals: | , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI
2019
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6523759/ https://ncbi.nlm.nih.gov/pubmed/30970643 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10040238 |
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