Φορτώνει......
Fabrication Technology and Characteristics Research of the Acceleration Sensor Based on Li-Doped ZnO Piezoelectric Thin Films
An acceleration sensor based on piezoelectric thin films is proposed in this paper, which comprises the elastic element of a silicon cantilever beam and a piezoelectric structure with Li-doped ZnO piezoelectric thin films. The Li-doped ZnO piezoelectric thin films were prepared on SiO(2)/Si by radio...
Αποθηκεύτηκε σε:
| Τόπος έκδοσης: | Micromachines (Basel) |
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| Κύριοι συγγραφείς: | , , , , , |
| Μορφή: | Artigo |
| Γλώσσα: | Inglês |
| Έκδοση: |
MDPI
2018
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| Θέματα: | |
| Διαθέσιμο Online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6187495/ https://ncbi.nlm.nih.gov/pubmed/30424111 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9040178 |
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