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Fabrication and Characteristics of an nc-Si/c-Si Heterojunction MOSFETs Pressure Sensor
A novel nc-Si/c-Si heterojunction MOSFETs pressure sensor is proposed in this paper, with four p-MOSFETs with nc-Si/c-Si heterojunction as source and drain. The four p-MOSFETs are designed and fabricated on a square silicon membrane by CMOS process and MEMS technology where channel resistances of th...
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| Main Authors: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Molecular Diversity Preservation International (MDPI)
2012
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3386745/ https://ncbi.nlm.nih.gov/pubmed/22778646 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s120506369 |
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