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Design and Fabrication of Microscale, Thin-Film Silicon Solid Immersion Lenses for Mid-Infrared Application

Lens-based optical microscopes cannot resolve the sub-wavelength objects overpass diffraction limit. Recently, research on super-resolution imaging has been conducted to overcome this limitation in visible wavelength using solid immersion lenses. However, IR imaging, which is useful for chemical ima...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Lee, Gil Ju, Kim, Hyun Myung, Song, Young Min
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2020
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7143082/
https://ncbi.nlm.nih.gov/pubmed/32120857
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11030250
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