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Thin Diamond Film on Silicon Substrates for Pressure Sensor Fabrication

Thin polycrystalline diamond films chemically vapor deposited on thinned silicon substrates were used as membranes for pressure sensor fabrication by means of selective chemical etching of silicon. The sensing element is based on a simple low-finesse Fabry–Pérot (FP) interferometer. The FP cavity is...

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Bibliografiske detaljer
Udgivet i:Materials (Basel)
Main Authors: Salvatori, Stefano, Pettinato, Sara, Piccardi, Armando, Sedov, Vadim, Voronin, Alexey, Ralchenko, Victor
Format: Artigo
Sprog:Inglês
Udgivet: MDPI 2020
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC7504279/
https://ncbi.nlm.nih.gov/pubmed/32825659
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma13173697
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