Thin Diamond Film on Silicon Substrates for Pressure Sensor Fabrication

Thin polycrystalline diamond films chemically vapor deposited on thinned silicon substrates were used as membranes for pressure sensor fabrication by means of selective chemical etching of silicon. The sensing element is based on a simple low-finesse Fabry–Pérot (FP) interferometer. The FP cavity is...

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Библиографические подробности
Главные авторы: Stefano Salvatori, Sara Pettinato, Armando Piccardi, Vadim Sedov, Alexey Voronin, Victor Ralchenko
Формат: Artigo
Язык:Inglês
Опубликовано: MDPI AG 2020-08-01
Серии:Materials
Предметы:
CVD diamond deposition
polycrystalline diamond films
high-pressure measurement
Fabry–Pérot cavity
harsh environment
Online-ссылка:https://www.mdpi.com/1996-1944/13/17/3697
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