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A highly CMOS compatible hafnia-based ferroelectric diode
Memory devices with high speed and high density are highly desired to address the ‘memory wall’ issue. Here we demonstrated a highly scalable, three-dimensional stackable ferroelectric diode, with its rectifying polarity modulated by the polarization reversal of Hf(0.5)Zr(0.5)O(2) films. By visualiz...
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| Publicado no: | Nat Commun |
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| Main Authors: | , , , , , , , , , , , , , , , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Nature Publishing Group UK
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7070068/ https://ncbi.nlm.nih.gov/pubmed/32170177 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41467-020-15159-2 |
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