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Electron Reflectometry for Measuring Nanostructures on Opaque Substrates
Here, we present a method for measuring dimensions of nanostructures using specular reflection of electrons from an electronically opaque surface. Development of this method has been motivated by measurement needs of the semiconductor industry(1–4), and it can also be more broadly applicable to any...
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| Publicado no: | Appl Phys Lett |
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| Main Authors: | , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2019
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7067307/ https://ncbi.nlm.nih.gov/pubmed/32165739 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.5113489 |
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