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Electron Reflectometry for Measuring Nanostructures on Opaque Substrates
Here, we present a method for measuring dimensions of nanostructures using specular reflection of electrons from an electronically opaque surface. Development of this method has been motivated by measurement needs of the semiconductor industry(1–4), and it can also be more broadly applicable to any...
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| Veröffentlicht in: | Appl Phys Lett |
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| Hauptverfasser: | , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
2019
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7067307/ https://ncbi.nlm.nih.gov/pubmed/32165739 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.5113489 |
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