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Black GaAs with Sub-Wavelength Nanostructures Fabricated via Lithography-Free Metal-Assisted Chemical Etching

A practical nanofabrication process is detailed here for the generation of black GaAs. Discontinuous thin films of Au nanoparticles are electrodeposited onto GaAs substrates to catalyze site-specific etching in a solution of KMnO(4) and HF according to the metal-assisted chemical etching mechanism....

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Detalles Bibliográficos
Publicado en:ECS J Solid State Sci Technol
Main Authors: Wilhelm, Thomas S., Kolberg, Alex P., Baboli, Mohadeseh A., Abrand, Alireza, Bertness, Kris A., Mohseni, Parsian K.
Formato: Artigo
Idioma:Inglês
Publicado: 2019
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Acceso en liña:https://ncbi.nlm.nih.gov/pmc/articles/PMC7053562/
https://ncbi.nlm.nih.gov/pubmed/32128288
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1149/2.0311906jss
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